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CVD Polymers.pdf

File Name: CVD Polymers.pdf
Size: 6671 KB
Uploaded: 29 Jun 2018 20:57:03
Author: Karen K. Gleason
Publisher : John Wiley & Sons Published Date : 2015-03-05
Page : 400 Pages.

The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from the vapor phase. Already widely used fo...

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